Rchr
J-GLOBAL ID:200901033660587806
Update date: Sep. 14, 2022
Moriyama Miki
モリヤマ ミキ | Moriyama Miki
Affiliation and department:
旧所属 京都大学 大学院工学研究科 材料工学専攻
About 旧所属 京都大学 大学院工学研究科 材料工学専攻
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Job title:
助手
Research field (3):
Material fabrication and microstructure control
, Metallic materials
, Electric/electronic material engineering
Research keywords (4):
Grain boundary Migration
, Thin Metal Films
, 粒界移動
, 金属薄膜材料
Research theme for competitive and other funds (5):
p-GaNおよびInGaN半導体に対するオーム性電極材の開発
Cu配線材料に対する拡散バリア材の研究
金属薄膜材料における粒成長に関する研究
Study on Diffusion Barrier Materials for Cu Interconnects
Study on Grain Growth in thin Metal Films.
MISC (15):
Effect of Annealing Atmosphere on Void Formation in Copper Interconnects. Materials Transactions. 2002. 43(7), 1624-1628
Correlation between microstructure and barrier properties of Tin thin films used Cu interconnects. Thin Solid Films. 2002. 416, 136-144
Effect of Annealing Atmosphere on Void Formation in Copper Interconnects. Materials Transactions. 2002. 43(7), 1624-1628
Correlation between microstructure and barrier properties of Tin thin films used Cu interconnects. Thin Solid Films. 2002. 416, 136-144
The effect of strain on grain gronth in Cu thin films. Proceeding of PRICM4. 2001. P2833-2836
more...
Patents (1):
半導体放射線検出素子
Education (4):
- 1998 Tokyo Institute of Technology Interdisciplinary Science and Engineering
- 1998 Tokyo Institute of Technology Graduate School, Division of Integrated Science and Engineering
- 1992 Tokyo Institute of Technology School of Engineering Dept. of Metallurgical Engineering
- 1992 Tokyo Institute of Technology Faculty of Engineering
Professional career (1):
Doctor of Engineering (Tokyo Institute of Technology)
Work history (2):
1998 - 2002 Kyoto University Faculty of Engineering
1998 - 2002 Research Associate, Faculty of Engineering, Kyoto University
Awards (1):
2001 - 日本金属学会奨励賞
Association Membership(s) (2):
応用物理学会
, 日本金属学会
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