Rchr
J-GLOBAL ID：200901052976216650
Update date: Apr. 17, 2024
Takeyama Mayumi
タケヤマ マユミ | Takeyama Mayumi
Affiliation and department：
Research field (2)：
Metallic materials
, Electric/electronic material engineering
Research keywords (4)：
表面界面物性
, 電子・電気材料工学
, Suface Physics
, Electronic and Electric Materials Engineering
Research theme for competitive and other funds (6)：
MISC (66)：
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Mayumi B. Takeyama, Takaomi Itoi, Eiji Aoyagi, Atsushi Noya. Diffusion barrier properties of nano-crystalline TiZrN films in Cu/Si contact systems. Applied Surface Science. 2003. 216. 1-4. 181-186
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MB Takeyama, T Itoi, E Aoyagi, A Noya. Diffusion barrier properties of nano-crystalline TiZrN films in Cu/Si contact systems. APPLIED SURFACE SCIENCE. 2003. 216. 1-4. 181-186
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Spectroellipsometric Study of TaN and VN Films, J. Mistrik, K. Takahashi, R. Antos, M. Aoyama, T. Yamaguchi, Y. Anma, Y. Fukuda, M. B. Takeyama, A. Noya, Z.-T. Jang, S. M. Thurgate and G. V. Riessen. International Conference on Spectroscopic Elipsometry-3, Vienna, ThP. 2003. F43
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Structural Analyses of Cu[111]layer on Nb[110] Barrier Formed on SiO2, Md. Maniruzzaman, M. B. Takeyama, Y. Hayasaka, E. Aoyagi, T. Ohsuna, and A. Noya. 2003 Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices, Busan. 2003. 19-22
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Failure Mechanism of Nano-crystalline VN barrier in Cu/VN/SiO2/Si System, T. Itoi, O. Yanada, K. Satoh, M. B. Takeyama, and A. Noya. 2003 International Conference on Soled State Devices and Materials, Tokyo. 2003. 4-18, 526-527
ｍore...
Professional career (1)：
Awards (1)：
Association Membership(s) (2)：
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