Research field (1)：
Material fabrication and microstructure control
Research keywords (3)：
Extreme Ultraviolet
, micromachining
, laser ablation
Research theme for competitive and other funds (4)：
2004 - 2006 X線エキシトン法による無機透明材料のナノ加工技術の開発
2001 - 2004 X線エキシトン法による無機透明材料のナノ加工技術の開発
2001 - Nanomachining of inorganic transparent materials using laser plasma soft X-rays
Study on synthesizing new materials by means of laser ablation
Papers (116)：
H. Urai, T. Makimura, M. Ogawa. Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations. Springer Proceedings in Physics. 2018. 202. 383-386
Micrometer-scale high-aspect machining of PDMS elastomer using laser plasma EUV radiation
(The 23th International Symposium on Laser Precision Microfabrication)
EUV ablation of polydimethylsiloxane elastomer
(Photonics West 2023)
Ablation of polydimethylsiloxane elastomer using laser-plasma EUV radiation
(16th International Conference on Laser Ablation 2022)
High-aspect micromachining of PDMS sheets using laser plasma EUV radiation
(The 22nd International Symposium on Laser Precision Microfabrication 2021)
Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma
(The 8th International Congress on Laser Advanced Materials Processing 2019)
- 1994 Nagoya University Graduate School, Division of Natural Science
- 1989 Nagoya University Faculty of Science
Work history (2)：
1997 - 現在 University of Tsukuba Assistant Professor
1994 - 1997 University of Tsukuba Research Assistant
Committee career (1)：
2016/01 - 2019/02 SPIE Photonics West LAMOM conferenence chair
Association Membership(s) (6)：
THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN
, The Laser Society of Japan
, THE PHYSICAL SOCIETY OF JAPAN
, The Japan Society of Applied Physics
, SOCIETY OF NANO SCIENCEAND TECHNOLOGY
, The Japan Society of Applied Physics
