Rchr

J-GLOBAL ID：200901002087849474 Update date: Sep. 11, 2022

Kawata Hiroaki

カワタヒロアキ | Kawata Hiroaki

Affiliation and department：

Research field (3)： Semiconductors, optical and atomic physics , Nano/micro-systems , Nanomaterials

Research keywords (4)：微細加工 , 高周波プラズマ , Micro fabrication , RF plasma

Research theme for competitive and other funds (8)：

付着法による簡便なマイクロマシン作製プロセスの開発
Deepエッチング技術の開発
マイクロマシンに関する基礎的研究
微細加工に関する基礎的研究
RF放電の基礎的研究

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MISC (46)：

H Kawata, Y Hirai, H Kikuta. Imprint/photo hybrid lithography using conventional contact aligner. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. 2004. 43. 6B. 4027-4030
H Kawata, Y Hirai, H Kikuta. Imprint/photo hybrid lithography using conventional contact aligner. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. 2004. 43. 6B. 4027-4030
Fabrication Process for Surface Micromachine with Small Sticking Problem by Use of Image Reversal Resist as Sacrificial Layer. IEEJ Trans. SM. 2004. 124. No.3. 69
Ni Cantilever Fabrication by Transfer Process without Sacrificial Layer. Sensors and Materials. 2004. 16. 4. 211
Fabrication Process for Surface Micromachine with Small Sticking Problem by Use of Image Reversal Resist as Sacrificial Layer. IEEJ Trans. SM. 2004. 124. No.3. 69

ｍore...

Education (4)：

- 1983 Osaka Prefecture University
- 1983 Osaka Prefecture University Graduate School, Division of Engineering
- 1977 Osaka Prefecture University School of Engineering
- 1977 Osaka Prefecture University Faculty of Engineering

Professional career (1)：

Doctor (Osaka Prefecture University)

Association Membership(s) (3)：

日本真空協会 , 電気学会 , 応用物理学会

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