- 2022 - 2025 次世代集積回路配線と液体/金属接面in-situ計測:どこまでわかりどう使うか?
- 2020 - 2023 Development of a Mueller Matrix Microscope
- 2015 - 2018 Development and application of optical model for object recognition with the polarization fingerprint
- 2012 - 2015 Construction and its application of the polarization fingerprint
- 2011 - 2012 Interconnect formation for high-band-width packaging
- 2009 - 2011 Multiscale control of supercritical fluid thin film processing using fluctuation imaging ellipsometry
- 2008 - 2009 触媒作用を利用したシリコンへの微細配線形成技術の開発
- 2006 - 2008 Development of topography-sensitive nano device processing aided by in-situ ellipsometry in supercritical fluids
- 2007 - 2007 超高密度流体中での動的溶解度制御を利用した形状敏感型自己整合ナノプロセス
- 2003 - 2005 Development of Novel, High-Speed, and Environmentally-Friendly Thin Film Deposition Technology using Supercritical Carbon Dioxide Fluids
- 2002 - 2002 超臨界流体を利用した配線形成技術の研究
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