Research theme for competitive and other funds (36)：
2020 - 2023 ガラス内金属ナノ析出物の形状・位置制御とその工学的応用
2018 - 2023 透明材料の破壊過程の学理解明とそのためのオプティカルアナリシスベースの構築
2019 - 2022 Laser-induced metal sphere manipulation in glass
2018 - 2020 Development of novel cleavage technique of chemically strengthened glass using nano-precipitates formed by solid-state ion-exchange method
2017 - 2019 Laser-induced modification of diamond
2016 - 2019 Dynamics of laser-induced plasma ejection which is generated in bulk glass and its application
2014 - 2019 ダイヤモンドパワーデバイス用ウエハの研究開発
2015 - 2018 Elucidation of mechanical scribing mechanisms of glass sheet by ultrahigh speed photoelastic stress imaging technique, and development of dynamic scribing theory
2015 - 2018 Formation process of metal precipitation layer in glass substrate by solid-state ion-exchange method, and application to fine electrical wiring
2014 - 2017 Study on micro-nanometer scale cutting system by using elastic cantilever-type tool holder with force feedback
2014 - 2017 Development and applications of precision diamond cutting tools utilizing the modification of surface structure induced by a focused ion beam irradiation
2013 - 2015 Fabrication of plasma generator enhanced hot filament and research of phase-change from diamond to graphite
2012 - 2015 Dispersion process of metal nanoparticles in glass substrate prepared by electric field-assisted solid-state ion exchange
2014 - 2015 超高速顕微リアルタイム三次元応力可視化プラットフォームの開発
2012 - 2014 Particle manipulation in glass by laser illumination
2011 - 2014 Development of precision hybrid diamond tool and its application to micro-device fabrication
2011 - 2013 AFM機構によるLSI多重配線層の単一層表出診断法の研究
2011 - 2013 高精度複合型ダイヤモンドツールの開発と微細構造デバイスへの応用に関する研究
2011 - 2012 Development of fault detection/diagnosis method of multi-layered interconnection in LSI circuit by AFM mechanism
2009 - 2011 Study on SPM Aided V-shaped Micro-grooving on Curved Surface by Cantilever for processing
2011 - ナノ加工計測システムを用いたLSI多重配線層の故障解析・診断法の開発
2008 - 2010 The study on development of multifunctional diamond tools and its applications for micro/nano scale machining
2006 - 2008 集束イオンビームと化学エッチングを併用した3次元微細構造創製法に関する研究
2007 - 2008 Study on Micro Diamond Tool with High Accuracy
2005 - 2007 広範囲(100mm角)・微細(100nm幅)形状のための金型転写技術の開発
2005 - 2006 ダイヤモンドマイクロアレイ工具の創成と極微細加工に関する研究
2004 - 2006 ナノファクトリーのための自立型ナノ加工・計測システムの開発
2004 - 2006 Development of three-dimensional nanomachining and measuring system and its application to nano-scale molding
Kosuke Sakamoto, Daijiro Tokunaga, Sho Itoh, Hirofumi Hidai, Souta Matsusaka, Takashige Omatsu, Koji Koyama, Seong-Woo Kim, Noboru Morita. Laser slicing of a diamond at the {100} plane using an irradiation sequence that restricts crack propagation along the {111} plane. Diamond and Related Materials. 2023. 110045-110045
Hirofumi Kawamura, Riku Okuda, Souta Matsusaka, Kentaro Nomoto, Hiroki Kodaka, Hirofumi Hidai, Akira Chiba, Noboru Morita. Fine hole drilling of alkali-containing silicate glass substrate using preferential penetration of etchants around silver precipitates. Precision Engineering. 2022. 76. 141-148
Shukoh Yoshimura, Hirofumi Kawamura, Hirofumi Hidai, Souta Matsusaka, Akira Chiba, Tetsuo Kishi, Noboru Morita. Core-shell sphere formation by laser-induced migration of stainless steel sphere in silver-doped glass. Applied Physics A. 2022. 128. 5
レーザによるダイヤモンドのスライス加工. New diamond. 2020. 36. 2. 9-12
Afzahrul Hafizie, Kouzu Tomomi, Yamaguchi Makoto, Kawasegi Noritaka, Morita Noboru, Nishimura Kazuhito. Deep Ultraviolet Raman study of subsurface damage on single crystalline diamond by Ga ion irradiation (4th report):Oxygen concentration dependence of the etching of subsurface damaged layer by deep ultraviolet light irradiation. Proceedings of JSPE Semestrial Meeting. 2020. 2020. 88-89
