Morita Noboru

2016 - 2019 Dynamics of laser-induced plasma ejection which is generated in bulk glass and its application

2014 - 2019 ダイヤモンドパワーデバイス用ウエハの研究開発

2015 - 2018 Elucidation of mechanical scribing mechanisms of glass sheet by ultrahigh speed photoelastic stress imaging technique, and development of dynamic scribing theory

2015 - 2018 Formation process of metal precipitation layer in glass substrate by solid-state ion-exchange method, and application to fine electrical wiring

2014 - 2017 Study on micro-nanometer scale cutting system by using elastic cantilever-type tool holder with force feedback

2014 - 2017 Development and applications of precision diamond cutting tools utilizing the modification of surface structure induced by a focused ion beam irradiation

2013 - 2015 Fabrication of plasma generator enhanced hot filament and research of phase-change from diamond to graphite

2012 - 2015 Dispersion process of metal nanoparticles in glass substrate prepared by electric field-assisted solid-state ion exchange

2014 - 2015 超高速顕微リアルタイム三次元応力可視化プラットフォームの開発

2012 - 2014 Particle manipulation in glass by laser illumination

2011 - 2014 Development of precision hybrid diamond tool and its application to micro-device fabrication

2011 - 2013 AFM機構によるLSI多重配線層の単一層表出診断法の研究

2011 - 2013 高精度複合型ダイヤモンドツールの開発と微細構造デバイスへの応用に関する研究

2011 - 2012 Development of fault detection/diagnosis method of multi-layered interconnection in LSI circuit by AFM mechanism

2009 - 2011 Study on SPM Aided V-shaped Micro-grooving on Curved Surface by Cantilever for processing

2011 - ナノ加工計測システムを用いたLSI多重配線層の故障解析・診断法の開発

2008 - 2010 The study on development of multifunctional diamond tools and its applications for micro/nano scale machining

2006 - 2008 集束イオンビームと化学エッチングを併用した3次元微細構造創製法に関する研究

2007 - 2008 Study on Micro Diamond Tool with High Accuracy

2005 - 2007 広範囲(100mm角)・微細(100nm幅)形状のための金型転写技術の開発

2005 - 2006 ダイヤモンドマイクロアレイ工具の創成と極微細加工に関する研究

2004 - 2006 ナノファクトリーのための自立型ナノ加工・計測システムの開発

2004 - 2006 Development of three-dimensional nanomachining and measuring system and its application to nano-scale molding

2003 - 2005 物理的除去加工と化学的除去加工を併用した3次元マイクロ構造形成法に関する研究

2001 - 2003 Micro-Fabrication by Using Combination Technique of Nano-scale Machining and Alkaline Etching

1997 - 1999 Development of Tool Wear Monitor for High Speed Endmilling

1997 - 1999 Study on Mechanism of Micro-machining using Friction Force Microscope

1996 - 1999 Research on Tribology Evaluation of Mechanical Contact Phenomena in Extreme Environment

1995 - 1997 STUDY ON TOOL WEAR MONITORING METHOD FOR HIGH SPEED MACHINING

1993 - 1995 STUDY ON MEASURING SYSTEM IN SPECIAL ENVIROMENT FOR MICROSCOPIC STRUCTURE OF NANOMACHINED SURFACE

1993 - 1995 STUDY ON FLEXIBLE LAPPING AND GRAINDING TOOLS FOR MIRROR SURFACE FINISHING