Rchr
J-GLOBAL ID:200901036470194904
Update date: Nov. 19, 2024
Sakuraba Masao
サクラバ マサオ | Sakuraba Masao
Affiliation and department:
Job title:
Associate Professor
Homepage URL (1):
http://www5a.biglobe.ne.jp/~tenrou/
Research field (4):
Electric/electronic material engineering
, Thin-film surfaces and interfaces
, Crystal engineering
, Applied materials
Research keywords (6):
large-scale integration process
, plasma chemical vapor deposition
, epitaxial growth
, group IV semiconductor
, quantum effect device
, Strained heterostructure
Research theme for competitive and other funds (24):
- 2024 - 2027 3C/4Hヘテロエピ基板を用いた高信頼・高移動度SiCパワーMOSFET製作
- 2022 - 2025 エッジ応用に向けた超低消費電力スパイキングニューラルネットワークハードウェア
- 2018 - 2020 Si極薄膜における低エネルギープラズマ誘起再配列による結晶構造転換の実験的研究
- 2015 - 2018 Selective Formation of Relaxed Ge Thin Film and Quantum Dot by Sub-Monolayer Carbon Mediation
- 2012 - 2015 Formation of relaxed Ge thin films by surfactant mediation and its application to devices
- 2011 - 2014 Process development for high-performance highly-strained quantum-heterostructure resonant-tunneling devices of group-IV semiconductors
- 2007 - 2009 Group IV Semiconductor Quantum Device Fabrication for Room Temperature Operation
- 2007 - 2009 Creation of High-Carrier-Concentration and High-Mobility Artificial Crystal of Group IV Semiconductors by Atomically Controlled CVD Processing
- 2006 - 2009 Fluctuations in Interface Properties and Noise in Nano-Scaled Devices
- 2006 - 2009 Development of Atomically Controlled Plasma Processing for GroupIV Quantum Device Fabrication
- 2006 - 2008 Pioneer study on hetero-interfaces to realize non-classical nano-hetero-devices
- 2004 - 2006 Electronicband modulation and formation of quantum tunneling structures by atomic-layer control of group-IV semiconductors
- 2003 - 2005 Creation of Artificial Crystal with Atomically-Controlled Group-IV Semiconductor Heterostructures
- 2001 - 2003 Formation of Very Low Contact Resistance between Metal and Semiconductor using Semiconductor Structures with Ultra High Carrier Concentration
- 1999 - 2003 人工IV族半導体の形成と光・電子物性制御
- 2000 - 2002 Fabrication of Resonant Tunneling Diode by Atomic Layer-by-Layer Epitaxial Growth of Si-Ge-C-N System
- 1999 - 2001 Development of SiGe System MOS-HBT Technology for Fabrication of High Integrated Communication System
- 1999 - 2000 Si-Ge系エピタキシャル成長による超高濃度不純物半導体の形成とその物性
- 1998 - 1998 Si系アモルファス絶縁薄膜の表面構造敏感エッチングと原子制御
- 1998 - 1998 IV族半導体極微細構造形成プロセスに関する研究
- 1996 - 1998 Langmuir Adsorption and Reaction Control in Process for Fabrication of Ultrasmall Group IV Semiconductor Devices
- 1997 - 1997 IV族半導体薄膜へのタングステンのデルタド-ピング
- 1996 - 1996 IV族半導体極微細構造形成プロセスに関する研究
- 1996 - 1996 IV族半導体極微細構造形成プロセスに関する研究
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Papers (218):
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Hiroyuki Nagasawa, Yasuo Cho, Maho Abe, Takenori Tanno, Michimasa Musya, Masao Sakuraba, Yusuke Sato, Shigeo Sato. SNDM Study of the MOS Interface State Densities on the 3C-SiC / 4H-SiC Stacked Structure. Solid State Phenomena. 2024. 362. 19. 33-40
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Yifan Dai, Hideaki Yamamoto, Masao Sakuraba, Shigeo Sato. Computational Efficiency of a Modular Reservoir Network for Image Recognition. Frontiers in Computational Neuroscience. 2021. 15
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Yoshihiro Osakabe, Shigeo Sato, Hisanao Akima, Mitsunaga Kinjo, Masao Sakuraba. Learning rule for a quantum neural network inspired by Hebbian learning. IEICE Transactions on Information and Systems. 2021. E104D. 2. 237-245
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Wu Li, Masao Sakuraba, Shigeo Sato. Electron-cyclotron resonance Ar plasma-induced electrical activation of B atoms without substrate heating in B doped Si epitaxial films on Si(100). Materials Science in Semiconductor Processing. 2020. 107
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Shigeo Sato, Yuki Tamura, Satoshi Moriya, Tatsuki Kato, Masao Sakuraba, Yoshihiko Horio, Jordi Madrenas. A spiking neuron MOS circuit for low-power neuromorphic computation. Proceedings of International Symposium on Nonlinear Theory and Its Applications. 2019. 80-80
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MISC (10):
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SAKURABA Masao, MUTO Daisuke, MORI Masaki, SUGAWARA Katsutoshi, MUROTA Junichi. Epitaxial Growth of Group IV Semiconductor in ECR Plasma Enhanced CVD. 2006. 2006. 15. 39-43
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TSUCHIYA Toshiaki, SAKURABA Masao, MUROTA Junichi. Hot-Carrier-Degradation of Hetero-Interface in SiGe/Si-Hetero-MOSFETs. 2006. 2006. 15. 1-6
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財満鎭明, 櫻庭政夫, 室田淳一. SiGe技術の最新研究動向. 電子材料. 2003. 6. 6. 97-103
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室田淳一, 櫻庭政夫, 松浦孝, 高澤裕真, 森谷敦, 野田孝暁, 国井泰夫. CVD Si1-x-yGexCyエピタキシャル成長とドーピング. 日立国際電気技報. 2001. 1. 2-10
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室田淳一, 櫻庭政夫, 松浦孝. CVD Si1-xGexエピタキシャル成長とドーピング制御. 日本結晶成長学会誌. 2000. 27. 171-178
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Patents (17):
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半導体デバイス
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電界効果トランジスタ及びその製造方法
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SEMICONDUCTOR DEVICE HAVING A METAL-SEMICONDUCOR JUNCTION WITH A REDUCED CONTACT RESISTANCE
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半導体装置
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SEMICONDUCTOR DEVICE HAVING A METAL-SEMICONDUCOR JUNCTION WITH A REDUCED CONTACT RESISTANCE
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Books (10):
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展示パネル「半導体って何だろう??」(「親子で知ろう!半導体ってなんだろう?inダテリウム」、主催:宮城県(経済商工観光部 新産業振興課))
宮城県(経済商工観光部 新産業振興課) 2024
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月刊「Newsがわかる」特別編 半導体がわかる2024
毎日新聞出版 2024
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月刊「Newsがわかる」特別編 半導体がわかる
毎日新聞出版 2023 ISBN:9784620794648
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Chapter 4: Low-Energy Plasma CVD for Epitaxy and In-Situ Doping of Group-IV Semiconductors in Nanoelectronics (in "Chemical Vapor Deposition (CVD): Types, Uses and Selected Research" (ebook) (Edited by Monica Powell))
Nova Science Publishers, Inc. 2017 ISBN:9781536109085
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Chapter 4: Low-Energy Plasma CVD for Epitaxy and In-Situ Doping of Group-IV Semiconductors in Nanoelectronics (in "Chemical Vapor Deposition (CVD): Types, Uses and Selected Research" (Book) (Edited by Monica Powell))
Nova Science Publishers, Inc. 2017 ISBN:9781536108934
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Lectures and oral presentations (311):
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Electrical Characteristics of Al-Gate MOS Diodes Using a 3C/4H Polytype-Heterostructure SiC Wafer Fabricated by Simultaneous Lateral Epitaxy (SLE) Method
(2024)
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Quantitative evaluation of 3C-SiC/4H-SiC stacked structure MOS interface using scanning nonlinear dielectric microscopy
(2024)
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Study of gate dielectric formation process and evaluation of electrical characteristics for high performance 4H-SiC-MOSFETs
(15th International WorkShop on New Group IV Semiconductor Nanoelectronics 2024)
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Formation of Alternating Epilayers of 4H-SiC and 3C-SiC by Simultaneous Lateral Epitaxy
(Internatonal Conference on Silicon Carbide and Related Materials (ICSCRM) 2024)
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4H-SiC-MOSFETの高性能化のためのゲート絶縁膜形成プロセスと電気特性評価に関する研究
(電気関係学会東北支部連合大会 2024)
more...
Education (3):
- 1992 - 1995 Tohoku University Graduate School of Engineering Department of Electrical and Communications Engineering, Doctor of Engineering
- 1990 - 1992 Tohoku University Graduate School of Engineering Department of Electrical and Communications Engineering, Master Course, Master of Engineering
- 1986 - 1990 Tohoku University School of Engineering Department of Electrical Engineering, Bachelor of Engineering
Professional career (1):
- 博士(工学) (Tohoku University)
Work history (6):
Committee career (13):
- 2018/02 - 現在 International WorkShop on New Group IV Semiconductor Nanoelectronics Organizing Committee Chair
- 2014/03 - 現在 (社)応用物理学会 シリコンテクノロジー分科会 ULSIデバイス研究委員会, 幹事
- 2023/01 - 2024/12 The Japan Section of The Electrochemical Society (ECS) Member-at-Large
- 2013/04 - 2015/03 (社)応用物理学会 論文賞委員会
- 2010/04 - 2012/03 (社)応用物理学会 和文機関紙「応用物理」編集委員会委員
- 2008/02 - 2010/01 (社)電気学会 新IV族原子制御デバイス材料技術調査専門委員会 幹事補佐
- 2008/01 - 2009/12 (社)応用物理学会 東北支部 庶務幹事
- 2007/05 - 2009/05 (社)電気学会 東北支部 協議員
- 2006/02 - 2008/01 (社)電気学会 IV族系ヘテロ超微細デバイス材料技術調査専門委員会 幹事補佐
- 2005/05 - 2007/05 電気関係学会東北支部連合大会 会計幹事
- 2005/05 - 2007/05 (社)電気学会 東北支部 会計幹事
- 2004/02 - 2006/01 (社)電気学会 IV族系へテロデバイス・システム材料技術調査専門委員会 幹事補佐
- 2002/02 - 2004/01 (社)電気学会 超高速SiGeデバイス材料技術調査専門委員会 幹事補佐
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Awards (3):
- 2015/11/27 - (財)石田實記念財団 平成27年度 石田實記念財団 研究奨励賞 「IV族半導体量子ヘテロ構造高集積化のためのプラズマCVDプロセスに関する研究」
- 2002/03/26 - (財)トーキン科学技術振興財団 第12回(平成13年度) トーキン科学技術振興財団 研究奨励賞 「原子層積層によるIV族半導体量子ヘテロ構造の製作」
- 1992/08/26 - 固体素子・材料に関する国際会議 Young Researcher Award, 1992 International Conference on Solid State Devices and Materials (SSDM'92) 【対象論文】 “Atomic Layer Control of Germanium and Silicon on Silicon Using Flash Heating in Ultraclean Chemical Vapor Deposition”
Association Membership(s) (2):
The Electrochemical Society
, 応用物理学会
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