J-GLOBAL ID:200901046462290037   Update date: May. 16, 2020

Kim Hoon

キム フン | Kim Hoon
Affiliation and department:
Research keywords  (4): CVD ,  Ru ,  信頼性 ,  銅配線
Research theme for competitive and other funds  (1):
  • Process development of highly reliable Cu interconnect by material design and oxidation / reduction chemistry of Cu-CVD
MISC (6):
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