About KIM Hoon
About Dep. of Materials Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-Ku, Tokyo 113-8656, JPN
About KOSEKI Toshihiko
About Dep. of Materials Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-Ku, Tokyo 113-8656, JPN
About OHBA Takayuki
About Div. of Univ. Corporate Relations, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-Ku, Tokyo 113-8654, JPN
About OHTA Tomohiro
About Div. of Univ. Corporate Relations, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-Ku, Tokyo 113-8654, JPN
About KOJIMA Yasuhiko
About Technol. Dev. Center, Tokyo Electron AT Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki-city, Yamanashi 407-0192, JPN
About SATO Hiroshi
About Technol. Dev. Center, Tokyo Electron AT Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki-city, Yamanashi 407-0192, JPN
About SHIMOGAKI Yukihiro
About Dep. of Materials Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-Ku, Tokyo 113-8656, JPN
About Thin Solid Films
About copper base alloy
About シリコン
About Manufacturing technology of solid-state devices
About Metallic thin films
About 高信頼性
About 大規模集積
About 相互接続
About Cu
About Sn
About 合金
About 作製
About プロセスデザイン