Horiuchi Toshiyuki

ホリウチトシユキ | Horiuchi Toshiyuki

Research field (2)： Applied physics - general , Optical engineering and photonics

Research keywords (2)：リソグラフィ , Lithography

Research theme for competitive and other funds (6)：

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MISC (64)：

Y Joshima, T Kokubo, T Horiuchi. Application of laser scan lithography to fabrication of microcylindrical parts. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS. 2004. 43. 6B. 4031-4035
ずらし=重露光による大ピッチラインパターン解像限界k1値の改善. 次世代リソグラフィワークショップ予稿集. 2004. 186-189
レーザースキャンによるレジスト表面の曲面加工と円柱面上のレジスト加工. フォトポリマー懇話会. 2004. 第148回 II-1-II-11
HIROTA Katsunori, HORIUCHI Toshiyuki. Thick Resist Pattern Replication Using Low Numerical-Aperture Projection Lithography and It's Application to Fabrication of Micro Components. Journal of the Japan Society for Precision Engineering, Contributed Papers. 2004. 70. 1. 138-143
Study on resolution limit for large-pitch line patterns using a newly developed Slim-Line Imaging Double-Exposure Recipe. 2004 ICO International Conference Optics & Photonice in Technology Frontier. 2004. 355-356

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Patents (13)：

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Education (2)：

- 1970 The University of Tokyo The Faculty of Engineering Department of Mechanical Engineering
- 1970 The University of Tokyo Faculty of Engineering

Professional career (1)：

Work history (4)：

1985 - 1997 日本電信電話株式会社LSI研究所
1997 - - 東京電機大学工学部精密機械工学科
1970 - 1985 日本電信電話公社電気通信研究所
Tokyo Denki University School of Engineering, Department of Mechanical Engineering

Committee career (2)：

Association Membership(s) (4)：

精密工学会 , 電子情報通信学会 , 電気学会 , 応用物理学会

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