Art
J-GLOBAL ID：200902006176417323   Reference number：91A0233022

X-ray mask fogging by electrons backscattered beneath the membrane.

支持膜下方での後方散乱電子によるX線マスクのかぶり
Author (3)：
CHRISTENSON K K

About CHRISTENSON K K

(FSI International, Minnesota)

About FSI International, Minnesota

, 
VISWANATHAN R G

About VISWANATHAN R G

(IBM Research Division, New York)

About IBM Research Division, New York

, 
HOHN F J

About HOHN F J

(IBM Research Division, New York)

About IBM Research Division, New York


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 8  Issue： 6  Page： 1618-1623  Publication year： Nov. 1990 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
photomask

About photomask

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
fog(photography)

About fog(photography)


   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=91A0233022&from=J-GLOBAL&jstjournalNo=E0974A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  X-ray instruments and techniques 
(BA02060D)

About X-ray instruments and techniques

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
後方散乱

About 後方散乱

, 
電子

About 電子

, 
X線マスク

About X線マスク

, 
かぶり

About かぶり


Return to Previous Page

TOP

BOTTOM