A MOSFET with Si-implanted Gate-SiO<sub>2</sub> Insulator for Nonvolatile Memory Applications.

HORI T; OHZONE T; ODAKE Y; HIRASE J

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J-GLOBAL ID：200902008330912378 Reference number：93A0380431

A MOSFET with Si-implanted Gate-SiO₂ Insulator for Nonvolatile Memory Applications.

不揮発性メモリ用の,Siイオン打込みゲートSiO₂絶縁膜を備えたMOSFET

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Author (4)： , , ,
Material：
Volume： 1992 Page： 469-472 Publication year： 1992
JST Material Number： C0829B ISSN： 0163-1918 Document type： Proceedings
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor integrated circuit , Memory units

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A MOSFET with Si-implanted Gate-SiO2 Insulator for Nonvolatile Memory Applications.

A MOSFET with Si-implanted Gate-SiO₂ Insulator for Nonvolatile Memory Applications.