Art
J-GLOBAL ID:200902009890830284   Reference number:88A0262676

An ultra precision straight motion system. (1st report). Two degrees of freedom control of motion.

超高精度直線運動機構 I 機構の試作と2自由度の制御
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Material:
Volume: 54  Issue:Page: 558-563  Publication year: Mar. 1988 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Motion mechanism 
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