Art
J-GLOBAL ID:200902044250476263
Reference number:90A0721023
CF4/O2 plasma etching and surface modification of polyimide films: Time-dependent surface fluorination and fluorination model.
ポリイミド膜のCF4/O2プラズマエッチングと表面改質:時間に依存した表面ふっ素化とふっ素化模型
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Author (3):
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Material:
Volume:
8
Issue:
3 Pt.2
Page:
2382-2387
Publication year:
May. 1990
JST Material Number:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
Document type:
Article
Article type:
原著論文
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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JST classification (3):
JST classification
Category name(code) classified by JST.
Surface structure of solids in general
, Other reactions of polymer
, Applications of plasma
Terms in the title (6):
Terms in the title
Keywords automatically extracted from the title.
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