Art
J-GLOBAL ID：200902044683535302   Reference number：92A0168873

Comparative study between gas- and liquid-phase silylation for the diffusion-enhanced silylated resist process.

拡散促進方式のシリル化レジスト処理での気相と液相のシリル化の比較
Author (3)：
BAIK K-H

About BAIK K-H

(Interuniversity Microelectronics Center(IMEC), Leuven, BEL)

About Interuniversity Microelectronics Center(IMEC), Leuven, BEL

, 
VAN DEN HOVE L

About VAN DEN HOVE L

(Interuniversity Microelectronics Center(IMEC), Leuven, BEL)

About Interuniversity Microelectronics Center(IMEC), Leuven, BEL

, 
ROLAND B

About ROLAND B

(Interuniversity Microelectronics Center(IMEC), Leuven, BEL)

About Interuniversity Microelectronics Center(IMEC), Leuven, BEL


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 9  Issue： 6  Page： 3399-3405  Publication year： Nov. 1991 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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photoresist

About photoresist

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
DESIRE

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Other reactions of polymer 
(CG03040H)

About Other reactions of polymer

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
拡散

About 拡散

, 
促進

About 促進

, 
シリル化

About シリル化

, 
レジスト

About レジスト

, 
気相

About 気相

, 
液相

About 液相


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