Fabrication and characterization of Si-coupled superconducting field effect transistors with 0.1μm gate.

HATANO M; MURAI F; NISHINO T; HASEGAWA H; KURE T; KAWABE U

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J-GLOBAL ID：200902056168391185 Reference number：90A0236984

Fabrication and characterization of Si-coupled superconducting field effect transistors with 0.1μm gate.

0.1μmのゲートを持つSi結合の超伝導性電界効果トランジスタの作製とその特性評価

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Material：
Volume： 7 Issue： 6 Page： 1333-1337 Publication year： Nov. 1989
JST Material Number： E0974A ISSN： 1071-1023 CODEN： JVTBD9 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Josephson junction and elements , 金属-絶縁体-半導体構造【’81~’92】 , Transistors

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