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J-GLOBAL ID：200902057736305104   Reference number：92A0331022

Lateral growth of cobalt silicide observed by an MeV helium ion microprobe.

MeVヘリウムイオンマイクロプローブによって観察したけい化コバルト横方向成長
Author (8)：
KINOMURA A

About KINOMURA A

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
RYSSEL H

About RYSSEL H

(Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen, Erlangen, DEU)

About Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen, Erlangen, DEU

, 
SATOU M

About SATOU M

(Government Industrial Research Inst. Osaka, Osaka, JPN)

About Government Industrial Research Inst. Osaka, Osaka, JPN

, 
TAKAI M

About TAKAI M

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
TSIEN P H

About TSIEN P H

(Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen, Erlangen, DEU)

About Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen, Erlangen, DEU

, 
CHAYAHARA A

About CHAYAHARA A

(Government Industrial Research Inst. Osaka, Osaka, JPN)

About Government Industrial Research Inst. Osaka, Osaka, JPN

, 
NAMBA S

About NAMBA S

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
BURTE E

About BURTE E

(Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen, Erlangen, DEU)

About Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen, Erlangen, DEU


Material：
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)

About Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms


Volume： 64  Issue： 1/4  Page： 770-773  Publication year： Feb. 1992 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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Rutherford scattering spectroscopy

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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computed tomography

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Radiochemical analysis of elements in inorganic substances 
(CC06022C)

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Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
ヘリウム

About ヘリウム

, 
イオンマイクロプローブ

About イオンマイクロプローブ

, 
観察

About 観察

, 
けい化コバルト

About けい化コバルト

, 
横方向成長

About 横方向成長


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