Art
J-GLOBAL ID：200902061495650880   Reference number：89A0419677

Diamond and diamondlike films: Deposition processes and properties.

ダイヤモンド膜とダイヤモンド様炭素膜 その作製法と性質
Author (2)：
DESHPANDEY C V

About DESHPANDEY C V

(Univ. California, CA, USA)

About Univ. California, CA, USA

, 
BUNSHAH R F

About BUNSHAH R F

(Univ. California, CA, USA)

About Univ. California, CA, USA


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 7  Issue： 3 Pt.2  Page： 2294-2302  Publication year： May. 1989 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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semiconductor thin film

About semiconductor thin film

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ダイヤモンド型構造

About ダイヤモンド型構造


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

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Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
ダイヤモンド膜

About ダイヤモンド膜

, 
ダイヤモンド様炭素

About ダイヤモンド様炭素

, 
作製法

About 作製法

, 
性質

About 性質


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