Art
J-GLOBAL ID：200902061495650880
Reference number：89A0419677
Diamond and diamondlike films: Deposition processes and properties.
ダイヤモンド膜とダイヤモンド様炭素膜 その作製法と性質
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Author (2)：
,
Material：
Volume：
7
Issue：
3 Pt.2
Page：
2294-2302
Publication year：
May. 1989
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
文献レビュー
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
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