Art
J-GLOBAL ID：200902071651996950   Reference number：93A0058862

Low temperature thermal oxidation sharpening of microcast tips.

低温熱酸化によるチップの微細型加工
Author (2)：
AKAMINE S

About AKAMINE S

(Stanford Univ., California)

About Stanford Univ., California

, 
QUATE C F

About QUATE C F

(Stanford Univ., California)

About Stanford Univ., California


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 10  Issue： 5  Page： 2307-2310  Publication year： Sep. 1992 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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scanning probe microscope

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Electron and ion microscopes 
(BD02050B)

About Electron and ion microscopes

,  Microscopy determination of structures 
(BK01040E)

About Microscopy determination of structures

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
低温

About 低温

, 
熱酸化

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, 
微細

About 微細


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