About PALMOUR J W
About North Carolina State Univ.
About DAVIS R F
About North Carolina State Univ.
About WALLETT T M
About Lewis Research Center National Aeronautics and Space Administration, Ohio
About BHASIN K B
About Lewis Research Center National Aeronautics and Space Administration, Ohio
About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films
About silicon carbide
About carbon tetrafluoride
About Manufacturing technology of solid-state devices
About 混合気
About SiC
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