Art
J-GLOBAL ID：200902080755457600   Reference number：89A0092081

Structure and composition of ZrN and (Ti,Al)N coatings.

ZrNと(Ti,Al)Nコーティング膜の構造と組成
Author (4)：
PENTTINEN I

About PENTTINEN I

(Helsinki Univ. Technology, Espoo, FIN)

About Helsinki Univ. Technology, Espoo, FIN

, 
MOLARIUS J M

About MOLARIUS J M

(Helsinki Univ. Technology, Espoo, FIN)

About Helsinki Univ. Technology, Espoo, FIN

, 
KORHONEN A S

About KORHONEN A S

(Helsinki Univ. Technology, Espoo, FIN)

About Helsinki Univ. Technology, Espoo, FIN

, 
LAPPALAINEN R

About LAPPALAINEN R

(Univ. Helsinki, Helsinki, FIN)

About Univ. Helsinki, Helsinki, FIN


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 6  Issue： 3 Pt.2  Page： 2158-2161  Publication year： May. 1988 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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nitride

About nitride

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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TEM

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,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Ceramic coating to metallic materials 
(YC02050V)

About Ceramic coating to metallic materials

,  Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Crystal structure of other inorganic compounds 
(BK07030J)

About Crystal structure of other inorganic compounds

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
Ti

About Ti

, 
Al

About Al

, 
コーティング膜

About コーティング膜

, 
組成

About 組成


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