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J-GLOBAL ID:200902092002488764   Reference number:88A0081956

An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering.

多結晶薄膜のイオンビームスパッタリング形成における固有応力のスケーリング則
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Volume: 62  Issue:Page: 1800-1807  Publication year: Sep. 01, 1987 
JST Material Number: C0266A  ISSN: 0021-8979  CODEN: JAPIAU  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Mechanical properties of solids in general  ,  Techniques and equipment of thin film deposition 
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