Art
J-GLOBAL ID：200902092002488764   Reference number：88A0081956

An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering.

多結晶薄膜のイオンビームスパッタリング形成における固有応力のスケーリング則
Author (1)：
WINDISCHMANN H

About WINDISCHMANN H

(Standard Oil Co., OH, USA)

About Standard Oil Co., OH, USA


Material：
Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)

About Journal of Applied Physics


Volume： 62  Issue： 5  Page： 1800-1807  Publication year： Sep. 01, 1987 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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ion beam sputtering

About ion beam sputtering

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Mechanical properties of solids in general 
(BL01021C)

About Mechanical properties of solids in general

,  Techniques and equipment of thin film deposition 
(BK14020I)

About Techniques and equipment of thin film deposition

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
多結晶薄膜

About 多結晶薄膜

, 
イオンビームスパッタリング

About イオンビームスパッタリング

, 
スケーリング則

About スケーリング則


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