Art
J-GLOBAL ID：200902098834408637
Reference number：89A0464664
Energetic particle bombardment of films during magnetron sputtering.
マグネトロンスパッタリング中の膜のエネルギー粒子衝撃
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Author (1)：
Material：
Volume：
7
Issue：
3 Pt.1
Page：
1025-1029
Publication year：
May. 1989
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Metallic thin films
, Applications of plasma
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