Preparation and optical properties of B-doped amorphous SiC:H films by Co-sputtering.

TOMIOKA YUGO; SAITO NOBUO; YAMAGUCHI TOMUO; KAWAMURA KAZUHIKO

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J-GLOBAL ID：200902099556214598 Reference number：90A0559396

Preparation and optical properties of B-doped amorphous SiC:H films by Co-sputtering.

Co-sputter法によるB添加a-SiC:H薄膜の作製と光学的特性

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Material：
Volume： 33 Issue： 3 Page： 132-134 Publication year： Mar. 1990
JST Material Number： G0194A ISSN： 0559-8516 CODEN： SHINA Document type： Article
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Semiconductor thin films , Optical properties of condensed matter in general

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