Art
J-GLOBAL ID：200902100866131437   Reference number：97A0194363

Mold-assisted nanolithography: A process for reliable pattern replication.

モールド補助ナノリソグラフィー 確かなパターン複製のためのプロセス
Author (4)：
HAISMA J

About HAISMA J

(Philips Res. Lab., Eindhoven, NLD)

About Philips Res. Lab., Eindhoven, NLD

, 
VERHEIJEN M

About VERHEIJEN M

(Philips Res. Lab., Eindhoven, NLD)

About Philips Res. Lab., Eindhoven, NLD

, 
VAN DEN HEUVEL K

About VAN DEN HEUVEL K

(Philips Res. Lab., Eindhoven, NLD)

About Philips Res. Lab., Eindhoven, NLD

, 
VAN DEN BERG J

About VAN DEN BERG J

(Philips Res. Lab., Eindhoven, NLD)

About Philips Res. Lab., Eindhoven, NLD


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 14  Issue： 6  Page： 4124-4128  Publication year： Nov. 1996 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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photolithography

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
モールドリソグラフィー

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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
モールド

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, 
ナノリソグラフィー

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, 
複製

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, 
プロセス

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