ArF surface modification resist process with enhanced water sorption ability.

MATSUO T; ENDO M; SHIRAI M; TSUNOOKA M

Art

J-GLOBAL ID：200902101402091420 Reference number：97A0194382

ArF surface modification resist process with enhanced water sorption ability.

水収着能の高いArF表面改質レジストプロセス

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Material：
Volume： 14 Issue： 6 Page： 4212-4215 Publication year： Nov. 1996
JST Material Number： E0974A ISSN： 1071-1023 CODEN： JVTBD9 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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