Art
J-GLOBAL ID：200902102883656414
Reference number：02A0505521
Microstructural characterization of radio frequency magnetron sputter-deposited Ga2O3:Mn phosphor thin films.
高周波マグネトロンスパッタ蒸着したGa2O3:Mn蛍光体薄膜の微細構造評価
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Author (2)：
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Material：
Volume：
20
Issue：
3
Page：
928-933
Publication year：
May. 2002
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films
Terms in the title (8)：
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