Art
J-GLOBAL ID：200902103857304999   Reference number：97A0194364

Nanoimprint lithography.

ナノインプリントリソグラフィー
Author (3)：
CHOU S Y

About CHOU S Y

(Univ. Minnesota, Minnesota)

About Univ. Minnesota, Minnesota

, 
KRAUSS P R

About KRAUSS P R

(Univ. Minnesota, Minnesota)

About Univ. Minnesota, Minnesota

, 
RENSTROM P J

About RENSTROM P J

(Univ. Minnesota, Minnesota)

About Univ. Minnesota, Minnesota


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 14  Issue： 6  Page： 4129-4133  Publication year： Nov. 1996 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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lithography

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,...
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Manufacturing technology of solid-state devices 
(NC03030V)

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