Preparation of in-plane textured Y2O3-doped ZrO2 thin film on polycrystalline metallic tape by modified bias sputtering.

AOKI S; FUKUTOMI M; KOMORI K; MAEDA H

Art

J-GLOBAL ID：200902104419047521 Reference number：94A0369030

Preparation of in-plane textured Y₂O₃-doped ZrO₂ thin film on polycrystalline metallic tape by modified bias sputtering.

修飾バイアススパッタリングによる多結晶金属テープ上への面内組織化Y₂O₃ドープZrO₂薄膜の作製

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Author (4)： , , ,
Material：
Volume： 12 Issue： 2 Page： 501-505 Publication year： Mar. 1994
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films , Superconducting materials

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