Art
J-GLOBAL ID：200902106868234975   Reference number：97A0194326

Nanofabrication technology by gas cluster ion beams.

ガスクラスタイオンビームによるナノ加工技術
Author (3)：
MATSUO J

About MATSUO J

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
TOYODA N

About TOYODA N

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
YAMADA I

About YAMADA I

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 14  Issue： 6  Page： 3951-3954  Publication year： Nov. 1996 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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cluster beam

About cluster beam

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
reactive ion etching

About reactive ion etching


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Applications of electron beams and ion beams 
(BD02070X)

About Applications of electron beams and ion beams

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
ガスクラスタイオンビーム

About ガスクラスタイオンビーム

, 
ナノ加工技術

About ナノ加工技術


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