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J-GLOBAL ID:200902108098779660   Reference number:01A1076187

Quantitative evaluation of strain near reconstructed Si surfaces.

再構成Si表面近傍での歪の定量的評価
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Volume: 493  Issue: 1/3  Page: 221-226  Publication year: Nov. 01, 2001 
JST Material Number: C0129B  ISSN: 0039-6028  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Surface structure of semiconductors 
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