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J-GLOBAL ID:200902109181522716   Reference number:02A0698092

Deposition of Diamond-Like Carbon Using Compact Electron-Beam-Excited Plasma Source.

コンパクトな電子ビーム励起プラズマ源を利用したダイヤモンド状炭素の蒸着
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Volume: 41  Issue:Page: 5408-5414  Publication year: Aug. 15, 2002 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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