Studies on the optimum condition for the formation of a neutral loop discharge plasma.

SUNG Y M; UCHINO K; MURAOKA K; SAKODA T

Art

J-GLOBAL ID：200902112791324828 Reference number：00A0906764

Studies on the optimum condition for the formation of a neutral loop discharge plasma.

中性ループ放電プラズマを形成するための最適条件

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Author (4)： , , ,
Material：
Volume： 18 Issue： 5 Page： 2149-2152 Publication year： Sep. 2000
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Plasma devices

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