Art
J-GLOBAL ID：200902112851417855   Reference number：96A0529988

Development of Dual Servo STM.

デュアルサーボ式STMの開発
Author (3)：
NAKAMURA AKINOBU

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(東京電力)

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, 
MITSUI KIMIYUKI

About MITSUI KIMIYUKI

(慶応大 理工)

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, 
GOTO TAKAYUKI

About GOTO TAKAYUKI

(三菱重工業 基盤技研)

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Material：
精密工学会誌  (Journal of the Japan Society for Precision Engineering)

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Volume： 62  Issue： 6  Page： 850-854  Publication year： Jun. 1996 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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scanning tunneling microscope

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,...
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PZT

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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

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Terms in the title (3)：
Terms in the title
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デュアル

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, 
STM

About STM

, 
開発

About 開発


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