Art
J-GLOBAL ID：200902113599258389   Reference number：00A0562664

Macro/microcavity method and its application in modeling chemical vapor deposition reaction systems.

マクロ/マイクロキャビティ法とその化学蒸着反応系のモデリングへの応用
Author (3)：
HONG L-S

About HONG L-S

(National Taiwan Univ. Sci. and Technol., Taipei, TWN)

About National Taiwan Univ. Sci. and Technol., Taipei, TWN

, 
SHIMOGAKI Y

About SHIMOGAKI Y

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
KOMJYAMA H

About KOMJYAMA H

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN


Material：
Thin Solid Films

About Thin Solid Films


Volume： 365  Issue： 2  Page： 176-188  Publication year： Apr. 17, 2000 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 文献レビュー  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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*chemical vapor deposition

About chemical vapor deposition

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Thin films in general 
(BK14010X)

About Thin films in general

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
マイクロキャビティ

About マイクロキャビティ

, 
化学蒸着

About 化学蒸着

, 
反応系

About 反応系

, 
モデリング

About モデリング

, 
応用

About 応用


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