Art
J-GLOBAL ID：200902118358605772   Reference number：97A0955180

Automated placement of testing pads for electron-beam observation.

電子ビーム観察用の検査パッドの自動配置
Author (2)：
KUJI N

About KUJI N

(NTT System Electronics Lab., Kanagawa, JPN)

About NTT System Electronics Lab., Kanagawa, JPN

, 
TAKEDA T

About TAKEDA T

(NTT System Electronics Lab., Kanagawa, JPN)

About NTT System Electronics Lab., Kanagawa, JPN


Material：
Microelectronics Reliability  (Microelectronics and Reliability)

About Microelectronics Reliability


Volume： 37  Issue： 10/11  Page： 1565-1568  Publication year： Oct. 1997 
JST Material Number： C0530A  ISSN： 0026-2714  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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*ASIC

About ASIC

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices 
(NC03040G)

About Measurement,testing and reliability of solid-state devices

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
電子ビーム

About 電子ビーム

, 
観察

About 観察

, 
検査

About 検査

, 
パッド

About パッド


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