Art
J-GLOBAL ID：200902118406422383
Reference number：02A0329852
Thermal agglomeration of single-crystalline Si layer on buried SiO2 in ultrahigh vacuum.
超高真空中における埋込みSiO2上の単結晶Si層の熱凝集
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Author (4)：
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Material：
Volume：
20
Issue：
1
Page：
167-172
Publication year：
Jan. 2002
JST Material Number：
E0974A
ISSN：
1071-1023
CODEN：
JVTBD9
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films
, Solid phase transitions
Terms in the title (5)：
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