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J-GLOBAL ID:200902119333577525   Reference number:01A0157031

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition.

集束イオンビーム化学蒸着による三次元ナノ構造の作製
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Volume: 18  Issue:Page: 3181-3184  Publication year: Nov. 2000 
JST Material Number: E0974A  ISSN: 1071-1023  CODEN: JVTBD9  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Thin films in general 
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