Fabrication of Probes for Profile Measurement of Microparts by Micro Die-sinking EDM. Fabrication of X and X-Z Type Probes.

TANIMURA HISASHI; YAMAGUCHI TETSUJI; MITSUI KIMIYUKI

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J-GLOBAL ID：200902122132517118 Reference number：99A0830358

Fabrication of Probes for Profile Measurement of Microparts by Micro Die-sinking EDM. Fabrication of X and X-Z Type Probes.

微細形彫放電加工によるマイクロ部品形状測定用探針の製作 X型及びX-Z型探針の製作

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Material：
Volume： 65 Issue： 9 Page： 1296-1300 Publication year： Sep. 05, 1999
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Measuring methods and instruments of length,area,cross section,volume,angle , Special machining

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