Study on a Stylus Profiling Instrument Based on a Fine and Coarse Dual-Servo Mechanism. Measuring Principle and a Few Measurement Results.

KUMADA TAKESHI; MITSUI KIMIYUKI; NAKAJIMA KAZUO; NAMATAME HIDEYUKI

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J-GLOBAL ID：200902147661565848 Reference number：97A0951163

Study on a Stylus Profiling Instrument Based on a Fine and Coarse Dual-Servo Mechanism. Measuring Principle and a Few Measurement Results.

粗微動連動制御機構による表面粗さ測定に関する研究装置の構成と2,3の測定結果

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Material：
Volume： 63 Issue： 10 Page： 1439-1443 Publication year： Oct. 1997
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Measuring methods and instruments of length,area,cross section,volume,angle

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