Art

J-GLOBAL ID：200902122689066542   Reference number：96A0169261

Progress towards λ/20 extreme ultraviolet interferometry.

λ/20極紫外線干渉測定法の進歩

Author (8)： GOLDBERG K A (Univ. California, California) ,  BEGUIRISTAIN R (Univ. California, California) ,  BOKOR J (Univ. California, California) ,  MEDECKI H (Lawrence Berkeley Lab., California) ,  ATTWOOD D T (Univ. California, California) ,  JACKSON K (Lawrence Berkeley Lab., California) ,  TEJNIL E (Univ. California, California) ,  SOMMARGREN G E (Lawrence Livermore National Lab., California)
Material： Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)
Volume： 13  Issue： 6  Page： 2923-2927  Publication year： Nov. 1995 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： Interferometry ,...

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JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (2)： 極紫外線 ,  干渉測定