Art

J-GLOBAL ID：200902123101264757   Reference number：02A0625624

Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams.

二層PZTバイモルフ梁により作動させた1D及び2Dマイクロスキャナーの設計及び作製

Author (5)： TSAUR J (National Inst. Advanced Industrial Sci. and Technol., Tsukuba, JPN) ,  ZHANG L (National Inst. Advanced Industrial Sci. and Technol., Tsukuba, JPN) ,  MAEDA R (National Inst. Advanced Industrial Sci. and Technol., Tsukuba, JPN) ,  MATSUMOTO S (National Inst. Advanced Industrial Sci. and Technol., Tsukuba, JPN) ,  KHUMPUANG S (National Inst. Advanced Industrial Sci. and Technol., Tsukuba, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 41  Issue： 6B  Page： 4321-4326  Publication year： Jun. 30, 2002 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *optical scanning ,...
Semi thesaurus term： PZT

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JST classification (3)： Optical instruments and techniques in general  (BD07010S) ,  Other optical equipment  (QF05060C) ,  Control equipment in general  (IC02010N)

Reference (14)：

• 1) M.-H. Kiang, O. Solgaard and R. S. Muller: IEEE J. Microelectromech. Syst. 7 (1998) 27.
• 2) S. Schweizer, S. Calmes, M. Laudon and Ph. Renand: J. Sensors & Actuat. <B>76</B> (1999) 470.
• 3) H. Toshiyoshi, D. Miyauchi and H. Fujita: IEEE J. Quantum Electron. 5 (1999) 10.
• 4) A. Schroth, C. Lee, S. Matsumoto and R. Maeda: J. Sensors & Actuat. <B>73</B> (1999) 144.
• 5) T. Gessner, S. Kurth, C. Kaufmann, J. Markert, A. Ehrlich and W. Dotzel: Proc. SPIE 4178 (2000) 338.

Terms in the title (9)： 二層 ,  PZT ,  バイモルフ ,  梁 ,  1D ,  2D ,  スキャナー ,  設計 ,  作製