Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams.

TSAUR J; ZHANG L; MAEDA R; MATSUMOTO S; KHUMPUANG S

Art

J-GLOBAL ID：200902123101264757 Reference number：02A0625624

Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams.

二層PZTバイモルフ梁により作動させた1D及び2Dマイクロスキャナーの設計及び作製

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Material：
Volume： 41 Issue： 6B Page： 4321-4326 Publication year： Jun. 30, 2002
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：短報 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Optical instruments and techniques in general , Other optical equipment , Control equipment in general

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5) T. Gessner, S. Kurth, C. Kaufmann, J. Markert, A. Ehrlich and W. Dotzel: Proc. SPIE 4178 (2000) 338.

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