Art
J-GLOBAL ID：200902123687735109   Reference number：01A0627499

Mechanical properties of thin films measured by nanoindenters.

ナノ押込圧子により測定した薄膜の機械的性質
Author (3)：
ISHIKAWA H

About ISHIKAWA H

(Machinery and Metallurgy Res. Inst. Chiba Prefecture, Chiba, JPN)

About Machinery and Metallurgy Res. Inst. Chiba Prefecture, Chiba, JPN

, 
FUDETANI S

About FUDETANI S

(Chiba Univ., Chiba, JPN)

About Chiba Univ., Chiba, JPN

, 
HIROHASHI M

About HIROHASHI M

(Chiba Univ., Chiba, JPN)

About Chiba Univ., Chiba, JPN


Material：
Applied Surface Science  (Appl Surf Sci)

About Applied Surface Science


Volume： 178  Issue： 1/4  Page： 56-62  Publication year： Jul. 02, 2001 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*indentation hardness

About indentation hardness

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Mechanical properties of solids in general 
(BL01021C)

About Mechanical properties of solids in general

,  Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Ceramic coating to metallic materials 
(YC02050V)

About Ceramic coating to metallic materials

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
ナノ押込

About ナノ押込

, 
圧子

About 圧子

, 
薄膜

About 薄膜

, 
機械的性質

About 機械的性質


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