Art
J-GLOBAL ID：200902129706558165   Reference number：00A0535732

Diagnostics of an inductively coupled CF4/Ar plasma.

誘導結合CF4/Arプラズマの診断
Author (5)：
HIOKI K

About HIOKI K

(Keio Univ., Yokohama, JPN)

About Keio Univ., Yokohama, JPN

, 
HIRATA H

About HIRATA H

(Keio Univ., Yokohama, JPN)

About Keio Univ., Yokohama, JPN

, 
MATSUMURA S

About MATSUMURA S

(Musashi Inst. Technol., Tokyo, JPN)

About Musashi Inst. Technol., Tokyo, JPN

, 
PETROVIC Z L

About PETROVIC Z L

(Keio Univ., Yokohama, JPN)

About Keio Univ., Yokohama, JPN

, 
MAKABE T

About MAKABE T

(Keio Univ., Yokohama, JPN)

About Keio Univ., Yokohama, JPN


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 18  Issue： 3  Page： 864-872  Publication year： May. 2000 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*inductively coupled plasma

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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computed tomography

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JST classification (1)：
JST classification
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Plasma diagnostics 
(BJ02090L)

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Tetrafluoromethane

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Terms in the title (4)：
Terms in the title
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誘導結合

About 誘導結合

, 
Ar

About Ar

, 
プラズマ

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, 
診断

About 診断


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