Art
J-GLOBAL ID：200902130320263371   Reference number：95A0396294

A Study of Electrical-Mechanical-Chemical(EMC) Polishing.

電気的に加工を制御した,機械,化学作用複合ポリシング法の研究
Author (1)：
SAMITSU YAMATO

About SAMITSU YAMATO

(新日本製鉄)

About 新日本製鉄


Material：
精密工学会誌  (Journal of the Japan Society for Precision Engineering)

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Volume： 61  Issue： 4  Page： 552-555  Publication year： Apr. 1995 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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All keywords is available on JDreamIII(charged).
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polishing (machining)

About polishing (machining)

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Materials of solid-state devices 
(NC03020K)

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,  Grinding 
(QC03000R)

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Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
ポリシング

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, 
研究

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