Art
J-GLOBAL ID：200902131108138946   Reference number：99A0245994

Hydrogen-Induced Interface Traps in a Palladium/Very Thin Oxide/Silicon Structure.

パラジウム/極薄酸化物/ケイ素構造の水素誘起界面トラップ
Author (1)：
ITO K

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(Shinshu Univ., Nagano, JPN)

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Material：
Sensors and Materials  (Sens Mater)

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Volume： 11  Issue： 1  Page： 41-50  Publication year： 1999 
JST Material Number： L0338A  ISSN： 0914-4935  CODEN： SENMER  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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*hydrogen

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,...
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JST classification (1)：
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Metal-insulator-semiconductor structures 
(BM03085X)

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Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
パラジウム

About パラジウム

, 
酸化物

About 酸化物

, 
ケイ素

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, 
水素

About 水素

, 
誘起

About 誘起

, 
界面トラップ

About 界面トラップ


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