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J-GLOBAL ID:200902131867066720   Reference number:02A0225962

In situ observation of nickel metal-induced lateral crystallization of amorphous silicon thin films.

非晶質けい素薄膜のニッケル金属誘起横方向結晶化のその場観察
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Volume: 80  Issue:Page: 944-946  Publication year: Feb. 11, 2002 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLAB  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Semiconductor thin films  ,  Crystal growth of semiconductors 
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