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J-GLOBAL ID：200902133135911684   Reference number：02A0272768

Density Functional Theory Calculations of Photoabsorption Spectra of Organic Molecules in the Vacuum Ultraviolet Region.

真空紫外領域での有機分子の光吸収スペクトルの密度汎関数理論計算

Author (3)： ANDO S (Tokyo Inst. technol., Tokyo, JPN) ,  FUJIGAYA T (Tokyo Inst. technol., Tokyo, JPN) ,  UEDA M (Tokyo Inst. technol., Tokyo, JPN)
Material： Japanese Journal of Applied Physics. Part 2. Letters  (Japanese Journal of Applied Physics. Part 2. Letters & Express Letters)
Volume： 41  Issue： 2A  Page： L105-L108  Publication year： Feb. 01, 2002 
JST Material Number： F0599B  ISSN： 0021-4922  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *photoresist ,...

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JST classification (1)： Visible and ultraviolet spectra of organic compounds  (BM08085G)

Reference (12)：

• 1) R. R. Kunz, T. M. Bloomstein, D. E. Hardy, R. B. Goodman, D. K. Downs and J. E. Curtin: Proc. SPIE 3678 (1999) 13.
• 2) K. Patterson, M. Yamachika, R. Huang, C. Brodsky, S. Yamada, M. Somervell, B. Osborn, D. Hall, G. Dukovic, J. Byers, W. Conley and C. G. Willson: Proc. SPIE 3999 (2000) 365.
• 3) T. Chiba, R. J. Hung, S. Yamada, B. Trinque, M. Yamachika, C. Brodsky, K. Patterson, A. V. Heyden, A. Jamieson, S.-H. Lin, M. Somervell, J. Byers, W. Conley and C. G. Willson: J. Photopolym. Sci. Technol. 13 (2000) 657.
• 4) C. Brodsky, J. Byers, W. Conley, R. Hung, S. Yamada, K. Patterson, M. Somervell, B. Trinque, H. V. Tran, S. Cho, T. Chiba, S.-H. Lin, A. Jamieson, H. Johnson, T. V. Heyden and C. G. Willson: J. Vac. Sci. & Technol. B <B>18</B> (2000) 3396.
• 5) N. N. Matsuzawa, S. Mori, E. Yano, S. Okazaki, A. Ishitani and D. A. Dixon: Proc. SPIE 3999 (2000) 375.

Terms in the title (4)： 真空紫外領域 ,  有機分子 ,  光吸収スペクトル ,  密度汎関数理論計算