X-Ray Stress Measurement and Mechanical Properties of TiN Films Coated on Aluminum and Aluminum Alloy Substrates by Arc Ion Plating and Ion Beam Mixing.

MIKI Y; TANIGUCHI T; HANABUSA T; KUSAKA K; MATSUE T

Art

J-GLOBAL ID：200902133966518008 Reference number：01A0143467

X-Ray Stress Measurement and Mechanical Properties of TiN Films Coated on Aluminum and Aluminum Alloy Substrates by Arc Ion Plating and Ion Beam Mixing.

アークイオンめっき法およびイオンビームミキシング法によりアルミニウムとアルミニウム合金基板に被覆したTiN薄膜のX線応力測定と機械的性質

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Material：
Volume： 6 Issue： 4 Page： 243-248 Publication year： Dec. 15, 2000
JST Material Number： L2329A ISSN： 1341-1683 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Metallic materials , Vapor plating

Reference (10)：

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SUTE, C. J. J.Mater.Res. 1991, 6, 950
NOYAN, I. C. Adv.X-Ray Anal. 1991, 34, 587
KUSAKA, K. Thin Solid Films. 1996, 290-291, 248
EJIRI, S. J.Soc.Mater.Sci., Japan. 1997, 46, 750

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