Three-ports Micro ER Valve for ER Suspension Fabricated by Photolithography

NAKANO M; KATOU T; SATOU A; MIYATA K; MATSUSHITA K

Art

J-GLOBAL ID：200902135339124226 Reference number：03A0289976

Three-ports Micro ER Valve for ER Suspension Fabricated by Photolithography

フォトリソグラフィーで製作したER懸架用のマイクロER3方弁

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Material：
Volume： 13 Issue： 7/8 Page： 503-508 Publication year： Jul. 2002
JST Material Number： W0165A ISSN： 1045-389X Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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